PVA Templates (Patents include 6,849,558 and 7,345,002)


  • High resolution nanopatterning templates to 10nm feature sizes
  • Large area patterning from 25mm to 450mm in width
  • Eliminates demolding from the template
  • Designed to enable the MxL nanopatterning technique
  • Templates can be coated with resists, polymers, metals
  • Conformal, water dissolvable, high throughput templates
  • Templates replicated conveniently from master topography

 

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