PVA Templates (Patents include 6,849,558 and 7,345,002)
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- High resolution nanopatterning templates to 10nm feature sizes
- Large area patterning from 25mm to 450mm in width
- Eliminates demolding from the template
- Designed to enable the MxL nanopatterning technique
- Templates can be coated with resists, polymers, metals
- Conformal, water dissolvable, high throughput templates
- Templates replicated conveniently from master topography
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