Transferring Photolithographic Latent Images
TDI introduces new latent image transfer processes that can integrate
the capabilities of
optical
lithography systems with TDI's high-resolution MxL processes
Santa Clara, CA, December 1, 2008 - Extending the capabilities of optical photolithography, TDI now offers a patented patterning process which transfers a latent image to many types of substrates, including silicon, glass or polymeric surfaces. Using the pattern generated by an optical photolithography system produced onto a dissolvable carrier surfaces, the process described in patent 7,125,639 images a photosensitive material, such as photoresist, and then transfers that to the working substrate, such as a semiconductor wafer. The carrier is then removed, for example by a water dissolution process, and then the image is developed on the substrate. TDI offers the templates and tools to conduct this patented process, referred to as the "LITe process".
The advantages of the LITe process, as compared to the conventional manner of directly photoimaging the resist on a substrate, include increasing the photolithographic process latitude with a planar imaging layer, increasing throughput by decoupling exposure step from the substrate, and expanding the range of substrate materials that can utilize the high resolution capabilities of advanced photolithography tools. The technique is applicable to contact, proximity and projection optical photolithography methods of patterning.
"In bringing this process technique to market, it is our intention to revolutionize the scope of applications by which the advantages of optical photolithography can be brought to bear. Previously optical photolithography systems were primarily limited to direct patterning on substrates in process, and now this scheme will allow new applications for the advanced high resolution tools. At this stage, we are realizing the LITe process in practice with our exaGlide lamination tooling and the template systems bearing the latent images generated by conventional photoimaging," noted Charles Schaper, President and CEO of Transfer Devices, Inc.
TDI is offering the whole product solution consisting of photoimaged templates and tools to implement the LITe process. Please contact TDI at 408-980-9684 or info@transferdevices.com for more information.
