|
 |
For large area nanopatterning of substrates from 25mm to 300mm in width, the exaGlide implements adhesion mechanisms to enable MxL processes with water dissolvable PVA templates for producing features sizes to 10nm and below. |
 |
High resolution, conformal nanopatterning templates, which dissolve in water but not in most functional materials such as resist and other organic polymers, enable the MxL class of processes, replicated conveniently from large area master topography. |
 |
After the formation of the PVA template, it is coated with a functional material layer, such as resist for use as an etch mask, post processed, inspected, packaged, and shipped to the user, thereby providing an efficient, convenient dry product ready for immediate cost effective implementation while eliminating the need for the user to handle hazardous materials. |
 |
Combining the exaGlide tool and functionalized PVA templates, along with mastering and services, all of which are available from TDI, a complete nanopatterning product solution is ready for turn-key implementation in a laboratory or pilot-scale setting. |
|
