fPVA - Functionalized Templates (Patents include 6,849,558 and 7,345,002)
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- Dry coated templates enabling the molecular transfer process
- Eliminates the need to handle hazardous materials such as resists
- Ease of use since the templates are directly applied
- Compatible with exaGlide lamination tooling
- Coatings include resists, adhesives, and metallized films
- Resolution to 10 nm and large areas to 450 mm processing
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